Patent 11189451 - Charged particle beam source and a method for assembling a charged particle beam source > Summary
US Patent
Patent Application No. US 11189451
Published on Nov 30, 2021
Application No. 17/110167
Field on Dec 2, 2020
Classification
International:
H01J 1/92
H01J 1/304;
H01J 9/02;
H01J 9/18;