Patent 11189451 - Charged particle beam source and a method for assembling a charged particle beam source > Summary

US Patent

Patent Application No. US 11189451

Published on Nov 30, 2021

Application No. 17/110167

Field on Dec 2, 2020

Classification

International:

H01J 1/92

H01J 1/304;

H01J 9/02;

H01J 9/18;