Patent 11280749 - Holes tilt angle measurement using FIB diagonal cut > Summary

US Patent

Patent Application No. US 11280749

Published on Mar 22, 2022

Application No. 17/079297

Field on Oct 23, 2020

Classification

International:

G01N 23/2251

H01J 37/305;

H01J 37/20;

H01J 37/28;

H01J 37/30;