Patexia. Research

Patent 05563084 - Method of making a three-dimensional integrated circuit > Summary

US Patent

Patent No. US 05563084

Published on Oct 8, 1996

Application No. 8/532858

Filed on Sep 22, 1995

Priority Date -

Inventor/Applicants

2

Buchner, Reinhold - Unterf ohring, DEX

Ramm, Peter - Pfaffenhofen, DEX

Classification

National:6

437/51

437/208;

437/8;

437/226;

437/974;

148/DIG.135;

Field of Search 9

148/DIG.135

437/51;

437/52;

437/59;

437/8;

437/56;

437/208;

437/226;

437/974;