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Patent 06238941 - Characterizing of silicon-germanium areas on silicon > Summary

US Patent

Patent No. US 06238941

Published on May 29, 2001

Application No. 9/652682

Filed on Aug 31, 2000

Priority Date -

Inventor/Applicants

2

Oberlin, Jean-Claude - Le Touvet, FRX

Dutartre, Didier - Meylan, FRX

Classification

National:3

438/14

378/72;

378/73;

Field of Search 3

378/73

378/72;

438/14;

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