US Patent
Patent No. US 06346736
Published on Feb 12, 2002
Application No. 09/469498
Filed on Dec 22, 1999
Priority Date -
Inventor/Applicants
3Ukeda, Takaaki - Osaka, JP
Kudo, Chiaki - Kyoto, JP
Yabu, Toshiki - Osaka, JP
Classification
International:
H01L 33/00
National:2
257/509
257/545;
Field of Search 4
257/509
257/506;
257/545;
257/598;