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Patent 06346736 - Trench isolated semiconductor device > Summary

US Patent

Patent No. US 06346736

Published on Feb 12, 2002

Application No. 09/469498

Filed on Dec 22, 1999

Priority Date -

Inventor/Applicants

3

Ukeda, Takaaki - Osaka, JP

Kudo, Chiaki - Kyoto, JP

Yabu, Toshiki - Osaka, JP

Classification

International:

H01L 33/00

National:2

257/509

257/545;

Field of Search 4

257/509

257/506;

257/545;

257/598;

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