US Patent
Patent No. US 06387824
Published on May 14, 2002
Application No. 09/492349
Filed on Jan 27, 2000
Priority Date -
Inventor/Applicants
Aoi, Nobuo - Hyogo, JP
Classification
International:
H01L 21/00
National:3
438/778
438/625;
427/245;
Field of Search 10
438/778
438/700;
438/706;
438/623;
438/624;
438/625;
438/487;
438/790;
438/627;
438/637;