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Patent 06760100 - Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate > Summary

US Patent

Patent No. US 06760100

Published on Jul 6, 2004

Application No. 09/804218

Filed on Mar 12, 2001

Priority Date -

Inventor/Applicants

2

Ivakhnenko, Vladimir I. - Norwood, MA

Stover, John C. - North Attleboro, MA

Classification

International:

G01N 21/00

National:3

356/237.2

356/237.3;

356/327.4;

Field of Search 3

702/35

702/81.84;

356/2372-2375;

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