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Patent 06806652 - High-density plasma source using excited atoms > Summary

US Patent

Patent No. US 06806652

Published on Oct 19, 2004

Application No. 10/249844

Filed on May 12, 2003

Priority Date -

Inventor/Applicants

Chistyakov, Roman - Andover, MA

Classification

International:

H01J 7/24

National:4

315/111.21

315/111.41;

156/345.44;

118/723.DC;

Field of Search 27

315/111.21

315/111.41;

315/111.61;

315/111.71;

315/111.81;

315/111.91;

204/298.7;

204/298.8;

204/298.121;

204/298.161;

204/298.2;

204/298.21;

204/298.22;

156/345.33;

156/345.35;

156/345.38;

156/345.39;

156/345.4;

156/345.41;

156/345.42;

156/345.43;

156/345.44;

156/345.46;

118/723.ME;

118/723.DC;

118/723.I;

118/723.IR;

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