Patent 06853142 - Methods and apparatus for generating high-density plasma > Summary

Patent No. US 06853142

Published on Feb 8, 2005

Application No. 10/065629

Filed on Nov 4, 2002

Priority Date -

Chistyakov, Roman - Andover, MA US

National:3

315/111.41

156/345.33;

118/723.1;

Field of Search 16

315/11101-11191

156/345.21;

156/345.29;

156/345.33;

156/345.42;

156/345.44;

156/345;

204/298.6;

204/298.4;

204/298.8;

118/723.FE;

118/723.1;

118/723.MP;

423/210;

423/246;

423/248;

Lee, Wilson