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Patent 06873052 - Porous, film, wiring structure, and method of forming the same > Summary

US Patent

Patent No. US 06873052

Published on Mar 29, 2005

Application No. 10/608126

Filed on Jun 30, 2003

Priority Date -

Inventor/Applicants

2

Aoi, Nobuo - Hyogo, JP

Aoi, Nobuo - Hyogo, JP

Classification

National:8

438/637

438/672;

257/760;

257/761;

257/762;

257/763;

257/764;

257/765;

Field of Search 4

257/760-768

257/700-705;

438/637-640;

438/672-775;

Examiner

2

Le, Dung A.

Le, Dung A.

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