Patexia Research
Patent No. US 06896773
Issue Date May 24, 2005
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Patent 06896773 - High deposition rate sputtering > Summary

US Patent

Patent No. US 06896773

Published on May 24, 2005

Application No. 10/065739

Filed on Nov 14, 2002

Priority Date -

Inventor/Applicants

2

Chistyakov, Roman - Andover, MA US

Chistyakov, Roman - Andover, MA US

Classification

National:8

204/192.12

204/192.13;

204/298.3;

204/298.6;

204/298.7;

204/298.8;

204/298.14;

204/298.19;

Field of Search 8

204/192.12

204/192.13;

204/298.3;

204/298.6;

204/298.7;

204/298.8;

204/298.14;

204/298.19;

Examiner

2

McDonald, Rodney G.

McDonald, Rodney G.

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