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Patent 06896775 - High-power pulsed magnetically enhanced plasma processing > Summary

US Patent

Patent No. US 06896775

Published on May 24, 2005

Application No. 10/065551

Filed on Oct 29, 2002

Priority Date -

Inventor/Applicants

2

Chistyakov, Roman - Andover, MA US

Chistyakov, Roman - Andover, MA US

Classification

National:10

204/192.32

204/298.31;

204/298.33;

204/298.34;

204/298.37;

216/67;

216/71;

156/345.43;

156/345.44;

156/345.46;

Field of Search 10

204/192.32

204/298.31;

204/298.33;

204/298.34;

204/298.37;

216/67;

216/71;

156/345.43;

156/345.44;

156/345.46;

Examiner

2

McDonald, Rodney G.

McDonald, Rodney G.

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