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Patent 07112121 - Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate > Summary

US Patent

Patent No. US 07112121

Published on Sep 26, 2006

Application No. 09/888084

Filed on Jun 21, 2001

Priority Date -

Inventor/Applicants

4

Lee, Whonchee - Boise, ID US

Meikle, Scott G. - Boise, ID US

Moore, Scott E. - Meridian, ID US

Doan, Trung T. - Meridian, ID US

Classification

International:

B24B 1/00

National:2

451/41

451/296;

Field of Search 9

451/41

451/285;

451/286;

451/287;

451/288;

451/289;

451/296;

451/5;

451/8;

Examiner

Nguyen, Dung Van

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