Patent 07112121 - Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate > Summary
US Patent
Patent No. US 07112121
Published on Sep 26, 2006
Application No. 09/888084
Filed on Jun 21, 2001
Priority Date -
Inventor/Applicants
4Lee, Whonchee - Boise, ID US
Meikle, Scott G. - Boise, ID US
Moore, Scott E. - Meridian, ID US
Doan, Trung T. - Meridian, ID US
Classification
International:
B24B 1/00
National:2
451/41
451/296;
Field of Search 9
451/41
451/285;
451/286;
451/287;
451/288;
451/289;
451/296;
451/5;
451/8;
Examiner
Nguyen, Dung Van