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Patent 07147759 - High-power pulsed magnetron sputtering > Summary

US Patent

Patent No. US 07147759

Published on Dec 12, 2006

Application No. 10/065277

Filed on Sep 30, 2002

Priority Date -

Inventor/Applicants

Chistyakov, Roman - Andover, MA US

Classification

International:

C23C 14/35

National:7

204/192.12

204/192.13;

204/298.3;

204/298.6;

204/298.8;

204/298.14;

204/298.19;

Field of Search 8

204/192.12

204/192.13;

204/298.3;

204/298.6;

204/298.8;

204/298.14;

204/298.19;

204/298.26;

Examiner

McDonald, Rodney G.

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