Patexia Research

Patent 07604716 - Methods and apparatus for generating high-density plasma > Summary

US Patent

Patent No. US 07604716

Published on Oct 20, 2009

Application No. 10/897257

Filed on Jul 22, 2004

Priority Date -

Inventor/Applicants

Chistyakov, Roman - Andover, MA US

Classification

International:2

C23C 14/35

C23C 16/00;

National:8

204/298.6

204/298.19;

315/111.21;

315/111.41;

118/723.R;

118/723.E;

204/192.12;

204/298.8;

Field of Search 8

204/192.12

204/298.8;

204/298.6;

204/298.19;

118/723.R;

118/723.E;

315/111.21;

315/111.41;

Examiner

McDonald, Rodney G

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