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Patent No. US 09721755
Issue Date Aug 1, 2017
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Patent 09721755 - Method and device for characterizing an electron beam > Summary

US Patent

Patent No. US 09721755

Published on Aug 1, 2017

Application No. 14/973230

Filed on Dec 17, 2015

Priority Date -

Inventor/Applicants

Lock, Tomas - Vaestra Froelunda, SE

Classification

International:17

G01N 23/00

H01J 37/304;

H01J 37/305;

H01J 37/244;

H01J 37/30;

H01J 37/317;

B23K 15/00;

B29C 67/00;

G01T 1/29;

B33Y 50/02;

B33Y 10/00;

B33Y 40/00;

B23K 15/02;

B28B 1/00;

B28B 17/00;

B22F 3/105;

B33Y 30/00;

Field of Search 6

250/305

250/306;

250/307;

250/311;

250/492.1;

250/492.3;

Examiner

McCormack, Jason

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