Search
Patexia Research
Patent No. US 11114366
Issue Date Sep 7, 2021
Claim this patent
PDF Unavailable

Patent 11114366 - Semiconductor structure with buried conductive line and method for forming the same > Summary

US Patent

Patent No. US 11114366

Published on Sep 7, 2021

Application No. 16/589263

Filed on Oct 1, 2019

Priority Date -

Inventor/Applicants

Liaw, Jhon-Jhy - Hsinchu County, TW

Classification

International:5

H01L 23/48

H01L 29/06;

H01L 27/092;

H01L 21/768;

H01L 21/8238;

Examiner

2

Kusumakar, Karen

Bowen, Adam S

Menu