US Patent
Patent No. US 11164849
Published on Nov 2, 2021
Application No. 17/196926
Filed on Mar 9, 2021
Priority Date -
Inventor/Applicants
2Tian, Kai - Hefei, CN
Li, Hongwen - Hefei, CN
Classification
International:3
H01L 23/528
H01L 25/065;
H01L 23/00;
Examiner
Harriston, William A