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Patexia Research
Patent No. US 11367995
Issue Date Jun 21, 2022
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Patent 11367995 - Electronic device > Claims

  • 1. An electronic device, comprising: a semiconductor substrate;a chip, wherein the chip includes a plurality of light emitting elements and a chip substrate having a different thermal expansion rate from a thermal expansion rate of the semiconductor substrate, wherein the plurality of light emitting elements are between the chip substrate and the semiconductor substrate, and wherein the plurality of light emitting elements each have an anode electrode and a cathode electrode on a same plane; anda connection part including a porous metal layer for connecting connection pads that are arranged on opposing surfaces of the semiconductor substrate and the chip.
    • 2. The electronic device according to claim 1, wherein a difference between the thermal expansion rates of the chip and the semiconductor substrate is 0.1 ppm/° C. or greater.
    • 3. The electronic device according to claim 1, wherein the chip is a semiconductor laser, andthe semiconductor substrate includes a drive circuit that drives the semiconductor laser.
      • 5. The electronic device according to claim 3, wherein the plurality of light emitting elements are two-dimensionally arrayed, each of which emits laser light.
        • 6. The electronic device according to claim 5, wherein the semiconductor substrate includes a switch, andthe switch is connected with the anode electrode or the cathode electrode.
          • 7. The electronic device according to claim 6, wherein the switch is connected with a corresponding group of the plurality of light emitting elements, andthe plurality of light emitting elements are subjected to light emission control for the corresponding group.
          • 8. The electronic device according to claim 6, wherein a plurality of switches are connected with respective ones of the plurality of light emitting elements, andthe plurality of light emitting elements are subjected to light emission control individually.
          • 9. The electronic device according to claim 6, wherein the anode electrode or the cathode electrode and the switch are connected with the connection part.
        • 10. The electronic device according to claim 5, wherein the plurality of light emitting elements are formed on the chip substrate.
        • 11. The electronic device according to claim 5, wherein the plurality of light emitting elements have a vertical cavity surface emitting laser (VCSEL) structure.
    • 4. The electronic device according to claim 1, wherein the chip is a semiconductor laser, andthe semiconductor substrate includes a temperature sensor.
    • 12. The electronic device according to claim 1, wherein insulating resin is filled between the semiconductor substrate and the chip and between the connection part.
    • 13. The electronic device according to claim 1, wherein the porous metal layer includes a metal particle with a particle diameter of 0.005 μm to 1.0 μm.
    • 14. The electronic device according to claim 1, wherein the connection part includes a metal film having a same component as a component of the porous metal layer at least between the porous metal layer and the connection pads on the semiconductor substrate side or between the porous metal layer and the connection pads on the chip side.
      • 15. The electronic device according to claim 14, wherein the metal film is formed such that a ratio of a film thickness to a thickness of the connection part in a direction perpendicular to a principle surface is set to be 10% or smaller.
        • 16. The electronic device according to claim 15, wherein the metal film is formed such that the ratio of the film thickness to the thickness of the connection part in the direction perpendicular to the principle surface is set to be less than 5%.
      • 17. The electronic device according to claim 14, wherein the metal film is formed such that a ratio of a film thickness to half of a thickness of the connection part in a direction perpendicular to a principle surface is set to be 10% or smaller.
        • 18. The electronic device according to claim 17, wherein the metal film is formed such that the ratio of the film thickness to the half of the thickness of the connection part in the direction perpendicular to the principle surface is set to be less than 5%.
    • 19. The electronic device according to claim 1, wherein a height ratio between the porous metal layer and the connection part in a direction perpendicular to a principle surface is larger than 90%.
    • 24. The electronic device according to claim 1, wherein the chip substrate is a different material than the semiconductor substrate.
      • 25. The electronic device according to claim 24, wherein the chip substrate is GaAs.
        • 26. The electronic device according to claim 25, wherein the semiconductor substrate is Si.
  • 20. An electronic device, comprising: a semiconductor substrate;a chip, wherein the chip includes a plurality of light emitting elements and a chip substrate having a different thermal expansion rate from a thermal expansion rate of the semiconductor substrate, wherein the plurality of light emitting elements are between the chip substrate and the semiconductor substrate, and wherein the plurality of light emitting elements each have an anode electrode and a cathode electrode on a same plane; anda bump including a metal film and a porous metal layer that are deposited on a surface of a connection pad on a surface of the semiconductor substrate, whereina ratio of a film thickness of the metal film to a total thickness of the bump in a direction perpendicular to the surface of the semiconductor substrate is 10% or smaller.
    • 21. The electronic device according to claim 20, wherein each of the plurality of light emitting elements is a semiconductor laser, wherein the semiconductor substrate includes a drive circuit that drives the semiconductor lasers,wherein the chip is mounted on the semiconductor substrate by flip chip mounting, andwherein the drive circuit controls the plurality of light emitting elements included in the chip in an independent manner by controlling switches correspondingly connecting the plurality of light emitting elements and a current supply source.
  • 22. An electronic device, comprising: a chip, the chip including: a chip substrate, the chip substrate having a first surface and a second surface opposite the first surface; anda plurality of light emitting elements, wherein the plurality of light emitting elements are disposed on the second surface of the chip substrate, wherein each of the plurality of light emitting elements is a semiconductor laser, wherein the plurality of light emitting elements each have an anode electrode and a cathode electrode on a same plane, and wherein the first surface of the chip substrate is a light emitting surface; anda bump including a metal film and a porous metal layer that are deposited on a surface of a connection pad on a surface of the chip,wherein a ratio of a film thickness of the metal film to a total thickness of the bump in a direction perpendicular to a surface of a semiconductor substrate is 10% or smaller.
    • 23. The electronic device according to claim 22, wherein the semiconductor lasers of the plurality of light emitting elements are vertical cavity surface emitting lasers, andwherein the plurality of light emitting elements are two-dimensionally arrayed.
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