Wafer dryer and method for drying a wafer | Patent Number 07181863

US 07181863 B2
Application Number11075872
Publication NumberUS 20050257396 A1
Pendency1 year, 11 months, 25 days
Filled DateMar 9, 2005
Priority DateMar 9, 2004
Publication DateNov 24, 2005
Expiration DateFeb 27, 2011
Inventor/ApplicantsJagjit S. Ratra
Gary W. Ferrell
ExaminesGRAVINI, STEPHEN MICHAEL
Art Unit3749
Technology Center3700
Assignments
Lam Research
Current
Sez America Inc.
Original
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