Wafer dryer and method for drying a wafer | Patent Publication Number 20050257396

US 20050257396 A1

Patent NumberUS 07181863 B2

Application Number11075872

Filled DateMar 9, 2005

Priority DateMar 9, 2004

Publication DateNov 24, 2005

Original AssigneeSez America Inc.

Current AssigneeLam Research

Inventor/ApplicantsJagjit S. Ratra
Gary W. Ferrell

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