Diffusion preventing barrier layer in integrated circuit inter-metal layer dielectrics | Patent Application Number 9377386

9377386
Not Appealed
Patent NumberUS 06727588 B1
Publication Number-
Filled DateAug 19, 1999
Priority DateAug 19, 1999
Inventor/ApplicantsPei H. Yih
Mahjoub Ali Abdelgadir
Sailesh Mansinh Merchant
Vivek Saxena
Nace Layadi
ExaminesOWENS, DOUGLAS W
Art Unit2811
Technology Center2800
Assignments
Bellnorthern Research
Current
Bell Semiconductor Llc
Current
Hilco Patent Acquisition 55 Llc
Current
Agere Systems BroadcomBroadcom
Original
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