Hardmask trim process | Patent Number 06420097
US 06420097 B1Filled DateMay 2, 2000
Priority DateMay 2, 2000
Publication Date-
Expiration DateMay 2, 2020
Inventor/ApplicantsScott A. Bell
Christopher L. Pike
Christopher L. Pike
ExaminesWALKE, AMANDA C
Art Unit1752
Technology Center1700
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