Adjustable wafer stage, and a method and system for performing process operations using same | Patent Number 06660651

US 06660651 B1
Application Number10010463
Publication Number-
Pendency2 years, 1 month, 1 day
Filled DateNov 8, 2001
Priority DateNov 8, 2001
Publication Date-
Expiration DateNov 8, 2021
Inventor/ApplicantsRichard J. Markle
ExaminesPOWELL, WILLIAM A
Art Unit1765
Technology Center1700
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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