Controlled thickness gate stack | Patent Number 06680516

US 06680516 B1
Application Number10313267
Publication Number-
Pendency1 year, 1 month, 15 days
Filled DateDec 6, 2002
Priority DateDec 6, 2002
Publication Date-
Expiration DateDec 6, 2022
Inventor/ApplicantsKrishnaswamy Ramkumar
Alain Blosse
ExaminesPRENTY, MARK V
Art Unit2822
Technology Center2800
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