Plasma generation using multi-step ionization | Patent Number 06805779
US 06805779 B2Filled DateMar 21, 2003
Priority DateMar 21, 2003
Publication DateSep 23, 2004
Expiration DateOct 19, 2016
Inventor/ApplicantsRoman Chistyakov
Roman Chistyakov
Roman Chistyakov
ExaminesVO, TUYET THI
Art Unit2821
Technology Center2800
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