Porous, film, wiring structure, and method of forming the same | Patent Number 06873052
US 06873052 B2Filled DateJun 30, 2003
Priority DateJan 27, 2000
Publication DateJan 1, 2004
Expiration DateJan 27, 2020
Inventor/ApplicantsNobuo Aoi
Nobuo Aoi
Nobuo Aoi
ExaminesLE, DUNG ANH
Art Unit2818
Technology Center2800
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