Semiconductor device, manufacturing method and apparatus for the same | Patent Number 06969915

US 06969915 B2
Application Number10043225
Publication NumberUS 20020093096 A1
Pendency3 years, 10 months, 20 days
Filled DateJan 14, 2002
Priority DateJan 14, 2002
Publication DateJul 18, 2002
Expiration DateJan 14, 2022
Inventor/ApplicantsTomohiro Nishiyama
Kaoru Mikagi
Tomohiro Nishiyama
Tetuya Tao
Kaoru Mikagi
Tetuya Tao
Masamoto Tago
Masamoto Tago
ExaminesPAREKH, NITIN
Art Unit2811
Technology Center2800
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