Contacts to semiconductor fin devices | Patent Number 07105894
US 07105894 B2Filled DateFeb 27, 2003
Priority DateFeb 27, 2003
Publication DateSep 2, 2004
Expiration DateFeb 27, 2023
Inventor/ApplicantsChenming Hu
Yee-Chia Yeo
Fu-Liang Yang
Fu-Liang Yang
Chenming Hu
Yee-Chia Yeo
Yee-Chia Yeo
Fu-Liang Yang
Fu-Liang Yang
Chenming Hu
Yee-Chia Yeo
ExaminesTRINH, HOA B
Art Unit2814
Technology Center2800
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