Test structure design for reliability test | Patent Number 07365529

US 07365529 B2
Application Number11465646
Publication NumberUS 20070013363 A1
Pendency1 year, 8 months, 15 days
Filled DateAug 18, 2006
Priority DateNov 24, 2004
Publication DateJan 18, 2007
Expiration DateApr 29, 2016
Inventor/ApplicantsNaomi Yoshida
Toshiyuki Nagata
ExaminesNGUYEN, TUNG X
Art Unit2829
Technology Center2800
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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