Top layers of metal for high performance ICs | Patent Number 07999384
US 07999384 B2Filled DateJul 27, 2007
Priority DateDec 21, 1998
Publication DateNov 15, 2007
Expiration DateAug 16, 2019
Inventor/ApplicantsMou-Shiung Lin
ExaminesANYA, IGWE U
Art Unit2891
Technology Center2800
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