Projection exposure apparatus with optimized adjustment possibility | Patent Number 09052609

US 09052609 B2
Application Number14195001
Publication NumberUS 20140176924 A1
Pendency1 year, 3 months, 8 days
Filled DateMar 3, 2014
Priority DateSep 25, 2008
Publication DateJun 26, 2014
Expiration DateSep 24, 2028
Inventor/ApplicantsMatthias Roesch
Boris Bittner
Holger Walter
ExaminesRIDDLE, CHRISTINA A
Art Unit2882
Technology Center2800
Assignments
Carl Zeiss Smt Gmbh
Current
Carl Zeiss Smt GmbhCarlzeissstiftung
Original
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