Projection objective for a microlithographic projection exposure apparatus | Patent Number 09280058

US 09280058 B2
Application Number14506992
Publication NumberUS 20150055109 A1
Pendency1 year, 5 months, 4 days
Filled DateOct 6, 2014
Priority DateJun 10, 2004
Publication DateFeb 26, 2015
Expiration DateJun 10, 2024
Inventor/ApplicantsRobert Eder
Norbert Wabra
ExaminesKREUTZER, COLIN WRIGHT
Art Unit2882
Technology Center2800
Assignments
Carl Zeiss Smt Gmbh
Current
Carl Zeiss Smt GmbhCarlzeissstiftung
Original
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