Organometallic solution based high resolution patterning compositions | Patent Number 09310684
US 09310684 B2Filled DateAug 22, 2013
Priority DateAug 22, 2013
Publication DateFeb 26, 2015
Expiration DateAug 21, 2033
Inventor/ApplicantsStephen T. Meyers
Douglas A. Keszler
Andrew Grenville
Kai Jiang
Jeremy Anderson
Douglas A. Keszler
Andrew Grenville
Kai Jiang
Jeremy Anderson
ExaminesMCPHERSON, JOHN A
Art Unit1722
Technology Center1700
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