Process for fabricating silicon nanostructures | Patent Number 10692971

US 10692971 B2
Application Number16054457
Publication NumberUS 20180350908 A1
Pendency1 year, 10 months, 25 days
Filled DateAug 3, 2018
Priority DateApr 14, 2008
Publication DateDec 6, 2018
Expiration DateApr 13, 2028
Inventor/ApplicantsFaris Modawar
Marcie R. Black
Brent A. Buchine
ExaminesAHMED, SELIM U
Art Unit2896
Technology Center2800
Assignments
Advanced Silicon Technology
Current
Advanced Silicon Technology
Original
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