Organotin oxide hydroxide patterning compositions, precursors, and patterning | Patent Number 11537048
US 11537048 B2Filled DateAug 6, 2020
Priority DateOct 13, 2015
Publication DateNov 26, 2020
Expiration DateOct 12, 2035
Inventor/ApplicantsKai Jiang
Jeremy T. Anderson
Douglas A. Keszler
Stephen T. Meyers
Alan J. Telecky
Joseph B. Edson
Brian J. Cardineau
Jeremy T. Anderson
Douglas A. Keszler
Stephen T. Meyers
Alan J. Telecky
Joseph B. Edson
Brian J. Cardineau
ExaminesTHOMAS, BINU
Art Unit1717
Technology Center1700
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