Organotin oxide hydroxide patterning compositions, precursors, and patterning | Patent Number 11537048

US 11537048 B2
Application Number16987120
Publication NumberUS 20200371439 A1
Pendency2 years, 4 months, 23 days
Filled DateAug 6, 2020
Priority DateOct 13, 2015
Publication DateNov 26, 2020
Expiration DateOct 12, 2035
Inventor/ApplicantsKai Jiang
Jeremy T. Anderson
Douglas A. Keszler
Stephen T. Meyers
Alan J. Telecky
Joseph B. Edson
Brian J. Cardineau
ExaminesTHOMAS, BINU
Art Unit1717
Technology Center1700
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