Radiation based patterning methods | Patent Number 11693312

US 11693312 B2

Application Number17895657

Publication NumberUS 20220413382 A1

Pendency10 months, 13 days

Filled DateAug 25, 2022

Priority Date-

Publication DateDec 29, 2022

Expiration DateAug 24, 2042

Inventor/ApplicantsAndrew Grenville
Douglas A. Keszler
Alan J. Telecky
Jason K. Stowers

ExaminesROBINSON, CHANCEITY N

Art Unit1722

Technology Center1700

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