Multiple dielectric FinFET structure and method | Patent Publication Number 20060054978

US 20060054978 A1

Patent NumberUS 07378357 B2

Application Number11264446

Filled DateNov 1, 2005

Priority DateMar 18, 2004

Publication DateMar 16, 2006

Original AssigneeInternational Business Machines

Current AssigneeGlobalfoundries

Inventor/ApplicantsEdward J. Nowak
William F. Clark, Jr.
William F. Clark

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