Introduction of metal impurity to change workfunction of conductive electrodes | Patent Publication Number 20080217747

US 20080217747 A1
Patent NumberUS 07750418 B2
Application Number12125508
Filled DateMay 22, 2008
Priority DateJan 20, 2006
Publication DateSep 11, 2008
Original AssigneeInternational Business Machines
Current AssigneeGlobalfoundries
Inventor/ApplicantsRajarao Jammy
Vijay Narayanan
Keith Kwong Hon Wong
Vamsi K. Paruchuri
Yun Y. Wang
Supratik Guha
Michael P. Chudzik
Bruce B. Doris
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