Semiconductor device including MISFET having internal stress film | Patent Publication Number 20090050981

US 20090050981 A1

Patent NumberUS 07893501 B2

Application Number12170191

Filled DateJul 9, 2008

Priority DateJun 3, 2004

Publication DateFeb 26, 2009

Original AssigneePanasonic

Current AssigneeGodo Kaisha Ip Bridge 1

Inventor/ApplicantsKaori Akamatsu
Hiroyuki Umimoto
Masafumi Tsutsui

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