Concurrent measurement of critical dimension and overlay in semiconductor manufacturing | Patent Application Number 10379738

10379738
Not Appealed
Patent NumberUS 07080330 B1
Publication Number-
Filled DateMar 5, 2003
Priority DateMar 5, 2003
Inventor/ApplicantsCarmen Morales
Bryan Choo
Bhanwar Singh
Bharath Rangarajan
ExaminesLIN, SUN J
Art Unit2825
Technology Center2800
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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