Concurrent measurement of critical dimension and overlay in semiconductor manufacturing | Patent Number 07080330

US 07080330 B1
Application Number10379738
Publication Number-
Pendency3 years, 4 months, 16 days
Filled DateMar 5, 2003
Priority DateMar 5, 2003
Publication Date-
Expiration DateMar 5, 2023
Inventor/ApplicantsCarmen Morales
Bhanwar Singh
Bharath Rangarajan
Bryan Choo
ExaminesLIN, SUN J
Art Unit2825
Technology Center2800
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
Law Firm
You must be logged in to view
Login
Attorneys
Subscription-Only
View Concierge Program
See the invalidated claims, subscribe to our Concierge Program.
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.