Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Patent Application Number 10381628

10381628
Not Appealed
Patent NumberUS 06969539 B2
Publication NumberUS 20040043149 A1
Filled DateSep 28, 2001
Priority DateSep 28, 2000
Inventor/ApplicantsJill Becker
Dennis Hausmann
Dennis Hausmann
Jill Becker
Seigi Suh
Roy G. Gordon
Roy G. Gordon
Seigi Suh
ExaminesCHEN, BRET P
Art Unit1762
Technology Center1700
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