Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Patent Application Number 10381628
10381628
Not Appealed
Patent NumberUS 06969539 B2
Publication NumberUS 20040043149 A1
Filled DateSep 28, 2001
Priority DateSep 28, 2000
Inventor/ApplicantsJill Becker
Dennis Hausmann
Dennis Hausmann
Jill Becker
Seigi Suh
Roy G. Gordon
Roy G. Gordon
Seigi Suh
Dennis Hausmann
Dennis Hausmann
Jill Becker
Seigi Suh
Roy G. Gordon
Roy G. Gordon
Seigi Suh
ExaminesCHEN, BRET P
Art Unit1762
Technology Center1700
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