Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate | Patent Application Number 12235086

12235086
Not Appealed
Patent NumberUS 07884446 B2
Publication NumberUS 20090014842 A1
Filled DateSep 22, 2008
Priority DateSep 24, 2004
Inventor/ApplicantsEric Mazur
Mengyan Shen
ExaminesNGO, NGAN V
Art Unit2893
Technology Center2800
Assignments
National University Of Science And Technology
Current
Harvard College
Original
Law Firm
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