Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate | Patent Number 07884446

US 07884446 B2
Application Number12235086
Publication NumberUS 20090014842 A1
Pendency2 years, 4 months, 19 days
Filled DateSep 22, 2008
Priority DateSep 24, 2004
Publication DateJan 15, 2009
Expiration DateSep 24, 2024
Inventor/ApplicantsEric Mazur
Mengyan Shen
ExaminesNGO, NGAN V
Art Unit2893
Technology Center2800
Assignments
National University Of Science And Technology
Current
Harvard College
Original
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