Tungsten metallization | Patent Application Number 7517973

7517973
Appealed
Patent NumberUS 05227335 NA
Publication Number-
Filled DateApr 30, 1990
Priority DateNov 10, 1986
Inventor/Applicants Virendra V. S. Rana
Lowell H. Holschwandner
ExaminesQUACH, TUAN N
Art Unit1104
Technology Center1100
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