Tungsten metallization | Patent Number 05227335

US 05227335 NA
Application Number7517973
Publication Number-
Pendency3 years, 2 months, 15 days
Filled DateApr 30, 1990
Priority DateNov 10, 1986
Publication Date-
Expiration DateNov 10, 2006
Inventor/Applicants Virendra V. S. Rana
Lowell H. Holschwandner
ExaminesQUACH, TUAN N
Art Unit1104
Technology Center1100
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