Micromechanical component and process for the fabrication thereof | Patent Application Number 8429576

8429576
Not Appealed
Patent NumberUS 05677560 NA
Publication Number-
Filled DateApr 27, 1995
Priority DateJan 22, 1993
Inventor/Applicants Gunther Zimmer
Wilfried Mokwa
ExaminesNGO, NGAN V
Art Unit2814
Technology Center2800
Assignments
Acacia Research Corporation
Current
Fraunhofergesellschaft
Original
Law Firm
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