Micromechanical component and process for the fabrication thereof | Patent Number 05677560

US 05677560 NA
Application Number8429576
Publication Number-
Pendency2 years, 5 months, 21 days
Filled DateApr 27, 1995
Priority DateJan 22, 1993
Publication Date-
Expiration DateJan 22, 2013
Inventor/Applicants Wilfried Mokwa
Gunther Zimmer
ExaminesNGO, NGAN V
Art Unit2814
Technology Center2800
Assignments
Acacia Research Corporation
Current
Fraunhofergesellschaft
Original
Law Firm
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