Parallel ion optics and apparatus for high current low energy ion beams | Patent Application Number 8662336

8662336
Not Appealed
Patent NumberUS 05811820 NA
Publication Number-
Filled DateJun 12, 1996
Priority DateJun 13, 1995
Inventor/Applicants Nicholas J. Kirchner
Efim A. Dynin
Oleg V. Alexandrov
Felix G. Gutman
ExaminesLORING, SUSAN
Art Unit1641
Technology Center1600
Assignments
Massively Parallel Technologies Inc.
Current
Massively Parallel Technologies Inc.
Original
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